Issued Patents All Time
Showing 51–62 of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6435868 | Multi-function chamber for a substrate processing system | John M. White, Michael W. Richter | 2002-08-20 |
| 6359250 | RF matching network with distributed outputs | Carl A. Sorensen | 2002-03-19 |
| 6286230 | Method of controlling gas flow in a substrate processing system | John M. White, Michael W. Richter | 2001-09-11 |
| 6213704 | Method and apparatus for substrate transfer and processing | John M. White, Robin L. Tiner, Shinichi Kurita | 2001-04-10 |
| 6206176 | Substrate transfer shuttle having a magnetic drive | John M. White | 2001-03-27 |
| 6193507 | Multi-function chamber for a substrate processing system | John M. White, Michael W. Richter | 2001-02-27 |
| 6086362 | Multi-function chamber for a substrate processing system | John M. White, Michael W. Richter | 2000-07-11 |
| 6016611 | Gas flow control in a substrate processing system | John M. White, Michael W. Richter | 2000-01-25 |
| 5815047 | Fast transition RF impedance matching network for plasma reactor ignition | Carl A. Sorensen, John M. White | 1998-09-29 |
| 5782974 | Method of depositing a thin film using an optical pyrometer | Carl A. Sorensen | 1998-07-21 |
| 5549756 | Optical pyrometer for a thin film deposition system | Carl A. Sorensen | 1996-08-27 |
| 4919542 | Emissivity correction apparatus and method | Jaim Nulman, Nick Bacile | 1990-04-24 |