Issued Patents All Time
Showing 26–50 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8088675 | Methods of making an emitter having a desired dopant profile | Robert Z. Bachrach | 2012-01-03 |
| 7981778 | Directional solid phase crystallization of thin amorphous silicon for solar cell applications | Robert Z. Bachrach | 2011-07-19 |
| 7858427 | Crystalline silicon solar cells on low purity substrate | — | 2010-12-28 |
| 7846762 | Integrated emitter formation and passivation | Robert Z. Bachrach | 2010-12-07 |
| 7749917 | Dry cleaning of silicon surface for solar cell applications | Michael P. Stewart | 2010-07-06 |
| 7569462 | Directional crystallization of silicon sheets using rapid thermal processing | Robert Z. Bachrach | 2009-08-04 |
| 6374770 | Apparatus for improving film stability of halogen-doped silicon oxide films | Peter Wai-Man Lee, Stuardo Robles, Anand Gupta, Amrita Verma | 2002-04-23 |
| 6289843 | Method and apparatus for improving the film quality of plasma enhanced CVD films at the interface | Anand Gupta, Amrita Verma, Mohan K. Bhan, Sudhakar Subrahmanyam | 2001-09-18 |
| 6291028 | Method and apparatus for improving the film quality of plasma enhanced CVD films at the interface | Anand Gupta, Amrita Verma, Mohan K. Bhan, Sudhakar Subrahmanyam | 2001-09-18 |
| 6191026 | Method for submicron gap filling on a semiconductor substrate | Andrew Conners, Anand Gupta, Xin Sheng Guo, Soonil Hong | 2001-02-20 |
| 6190233 | Method and apparatus for improving gap-fill capability using chemical and physical etchbacks | Soonil Hong, Choon Kun Ryu, Michael P. Nault, Kaushal K. Singh, Anthony Lam +1 more | 2001-02-20 |
| 6121163 | Method and apparatus for improving the film quality of plasma enhanced CVD films at the interface | Anand Gupta, Amrita Verma, Mohan K. Bhan, Sudhakar Subrahmanyam | 2000-09-19 |
| 6103601 | Method and apparatus for improving film stability of halogen-doped silicon oxide films | Peter Wai-Man Lee, Stuardo Robles, Anand Gupta, Amrita Verma | 2000-08-15 |
| 5990000 | Method and apparatus for improving gap-fill capability using chemical and physical etchbacks | Soonil Hong, Choon Kun Ryu, Michael P. Nault, Kaushal K. Singh, Anthony Lam +1 more | 1999-11-23 |
| 5944899 | Inductively coupled plasma processing chamber | Xin Sheng Guo | 1999-08-31 |
| 5827785 | Method for improving film stability of fluorosilicate glass films | Mohan K. Bhan, Sudhakar Subrahmanyam, Anand Gupta | 1998-10-27 |
| 5421401 | Compound clamp ring for semiconductor wafers | Semyon Sherstinsky, Mei Chang, Charles C. Harris, Alan F. Morrison, James Roberts +2 more | 1995-06-06 |
| 5328722 | Metal chemical vapor deposition process using a shadow ring | Steve Ghanayem | 1994-07-12 |
| 5328872 | Method of integrated circuit manufacturing using deposited oxide | Ajit S. Manocha, James Roberts, Ankineedu Velaga | 1994-07-12 |
| 5292554 | Deposition apparatus using a perforated pumping plate | Ashok Sinha, Steve Ghanayem | 1994-03-08 |
| 5227335 | Tungsten metallization | Lowell H. Holschwandner | 1993-07-13 |
| 5141897 | Method of making integrated circuit interconnection | Ajit S. Manocha | 1992-08-25 |
| 5135886 | Integrated circuit fabrication utilizing amorphous layers | Ajit S. Manocha, Arun K. Nanda | 1992-08-04 |
| 5084415 | Metallization processing | Ajit S. Manocha | 1992-01-28 |
| 4985371 | Process for making integrated-circuit device metallization | Nun-Sian Tsai | 1991-01-15 |