Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10262877 | Apparatus and method for reducing substrate sliding in process chambers | Kirankumar Neelasandra SAVANDAIAH, Cheng-Hsiung Tsai, Kai Liang Liew | 2019-04-16 |
| 10153187 | Methods and apparatus for transferring a substrate | Eng Sheng Peh, Srinivas D. Nemani, Arvind Sundarrajan, Avinash Avula, Ellie Yieh | 2018-12-11 |
| 10154586 | Apparatus and method for solid state source array design and fabrication | Joseph R. Johnson | 2018-12-11 |
| 9993853 | Method and apparatus for backside cleaning of substrates | Jen Sern Lew, Arvind Sundarrajan, Srinivas D. Nemani | 2018-06-12 |
| 9960023 | Methods and apparatus for nodule control in a titanium-tungsten target | Junqi Wei, Zhitao Cao, Yueh Sheng Ow, Ananthkrishna Jupudi, Kirankumar Neelasandra SAVANDAIAH +1 more | 2018-05-01 |
| 9845533 | Substrate carrier system utilizing electrostatic chucking to accommodate substrate size heterogeneity | Karthik Elumalai, Jen Sern Lew, Mingwei Zhu | 2017-12-19 |
| 9818624 | Methods and apparatus for correcting substrate deformity | Jen Sern Lew, Tuck Foong Koh, Karthik Elumalai, Eng Sheng Peh, Jun-Liang Su | 2017-11-14 |
| 9740111 | Electrostatic carrier for handling substrates for processing | Arvind Sundarrajan, Jen Sern Lew, Karthik Elumalai | 2017-08-22 |
| 9595464 | Apparatus and method for reducing substrate sliding in process chambers | Kirankumar Neelasandra SAVANDAIAH, Cheng-Hsiung Tsai, Kai Liang Liew | 2017-03-14 |
| 9478697 | Reusable substrate carrier | Mingwei Zhu, Karthik Elumalai, Thean Ming Tan, Yong Cao, Daniel Lee Diehl +1 more | 2016-10-25 |