Issued Patents All Time
Showing 51–68 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5996218 | Method of forming an electrostatic chuck suitable for magnetic flux processing | John F. Cameron, Chandra Deshpandey, Yuh-Jia Su | 1999-12-07 |
| 5986875 | Puncture resistant electrostatic chuck | Arik Donde, Hyman J. Levinstein, Robert Wu, Andreas Hegedus, Edwin C. Weldon +2 more | 1999-11-16 |
| 5883778 | Electrostatic chuck with fluid flow regulator | Semyon Sherstinsky, John F. Cameron, Manoocher Birang, Alfred Mak, Simon W. Tam +1 more | 1999-03-16 |
| 5880924 | Electrostatic chuck capable of rapidly dechucking a substrate | Ananda H. Kumar | 1999-03-09 |
| 5822171 | Electrostatic chuck with improved erosion resistance | Manoocher Birang, John F. Cameron, Chandra Deshpandey, Alfred A. Goldspiel, Ron Northrup +2 more | 1998-10-13 |
| 5801915 | Electrostatic chuck having a unidirectionally conducting coupler layer | Arnold Kholodenko, Alexander Veytser | 1998-09-01 |
| 5753132 | Method of making electrostatic chuck with conformal insulator film | Sasson Somekh, Hyman J. Levinstein, Manoocher Birang, Semyon Sherstinsky, John F. Cameron | 1998-05-19 |
| 5751537 | Multielectrode electrostatic chuck with fuses | Ananda H. Kumar | 1998-05-12 |
| 5745331 | Electrostatic chuck with conformal insulator film | Sasson Somekh, Hyman J. Levinstein, Manoocher Birang, Semyon Sherstinsky, John F. Cameron | 1998-04-28 |
| 5729423 | Puncture resistant electrostatic chuck | Arik Donde, Hyman J. Levinstein, Robert Wu, Andreas Hegedus, Edwin C. Weldon +2 more | 1998-03-17 |
| 5671117 | Electrostatic chuck | Semyon Sherstinsky, Manoocher Birang, Alfred Mak, Simon W. Tam | 1997-09-23 |
| 5646814 | Multi-electrode electrostatic chuck | Samuel Broydo, Manoocher Birang | 1997-07-08 |
| 5634266 | Method of making a dielectric chuck | Semyon Sherstinsky, Manoocher Birang, Alfred Mak, Simon W. Tam | 1997-06-03 |
| 5606485 | Electrostatic chuck having improved erosion resistance | John F. Cameron | 1997-02-25 |
| 5592358 | Electrostatic chuck for magnetic flux processing | John F. Cameron, Chandra Deshpandey, Yuh-Jia Su | 1997-01-07 |
| 5533923 | Chemical-mechanical polishing pad providing polishing unformity | Daniel O. Clark | 1996-07-09 |
| 5486975 | Corrosion resistant electrostatic chuck | Yoshi Tanase | 1996-01-23 |
| 4940508 | Apparatus and method for forming die sites in a high density electrical interconnecting structure | Paul N. Ludwig | 1990-07-10 |