Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6553922 | Safe for valuable documents | Leif Lundblad | 2003-04-29 |
| 6500357 | System level in-situ integrated dielectric etch process particularly useful for copper dual damascene | Lee Luo, Brian Sy-Yuan Shieh, Gerald Yin | 2002-12-31 |
| 6403491 | Etch method using a dielectric etch chamber with expanded process window | Jingbao Liu, Judy Wang, Takehiko Komatsu, Bryan Pu, Kenny L. Doan +4 more | 2002-06-11 |
| 6387288 | High selectivity etch using an external plasma discharge | Hongching Shan, Michael Welch | 2002-05-14 |
| 6362109 | Oxide/nitride etching having high selectivity to photoresist | Yungsang Kim, Takehiko Komatsu, Hongqing Shan | 2002-03-26 |
| 6340435 | Integrated low K dielectrics and etch stops | Min Melissa Yu, Hongquing Shan, David Cheung, Wai-Fan Yau, Kuowei Liu +7 more | 2002-01-22 |
| 6273022 | Distributed inductively-coupled plasma source | Bryan Pu, Hongching Shan, Kenny L. Doan, Mike Welch, Richard R. Mett | 2001-08-14 |
| 6232236 | Apparatus and method for controlling plasma uniformity in a semiconductor wafer processing system | Hongqing Shan, Paul Luscher, Richard R. Mett, Michael Welch | 2001-05-15 |
| 6113731 | Magnetically-enhanced plasma chamber with non-uniform magnetic field | Hongching Shan, Roger Alan Lindley, Xue-Yu Qian, Richard W. Plavidal, Bryan Pu +4 more | 2000-09-05 |
| 6074514 | High selectivity etch using an external plasma discharge | Hongching Shan, Michael Welch | 2000-06-13 |
| 5420922 | System for the safe transmission of messages | Leif Lundblad, Lars Eklund | 1995-05-30 |
| 5246527 | Foil-welding arrangement | Leif Lundblad, Tord Pettersson | 1993-09-21 |
| 5199247 | Arrangement for enveloping objects in enveloping material taken from two storage reels | Leif Lundblad, Tord Pettersson | 1993-04-06 |
| 5031379 | Message receiving arrangement | Leif Lundblad, Tord Pettersson | 1991-07-16 |