Issued Patents All Time
Showing 51–64 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6399446 | Process for fabricating high density memory cells using a metallic hard mask | Bharath Rangarajan, David K. Foote, Fei Wang, Stephen Keetai Park, Jack F. Thomas +2 more | 2002-06-04 |
| 6395644 | Process for fabricating a semiconductor device using a silicon-rich silicon nitride ARC | Minh Van Ngo, David K. Foote | 2002-05-28 |
| 6388309 | Apparatus and method for manufacturing semiconductors using low dielectric constant materials | Lu You, Richard J. Huang | 2002-05-14 |
| 6387825 | Solution flow-in for uniform deposition of spin-on films | Lu You, Richard J. Huang | 2002-05-14 |
| 6388330 | Low dielectric constant etch stop layers in integrated circuit interconnects | Minh Van Ngo, Robert A. Huertas, Terri Jo Kitson | 2002-05-14 |
| 6348410 | Low temperature hillock suppression method in integrated circuit interconnects | Minh Van Ngo, Robert A. Huertas | 2002-02-19 |
| 6335533 | Electron microscopy sample having silicon nitride passivation layer | Guarionex Morales, Lu You | 2002-01-01 |
| 6317642 | Apparatus and methods for uniform scan dispensing of spin-on materials | Lu You, Christof Streck, John G. Pellerin, Richard J. Huang | 2001-11-13 |
| 6225240 | Rapid acceleration methods for global planarization of spin-on films | Lu You, Richard J. Huang | 2001-05-01 |
| 6197703 | Apparatus and method for manufacturing semiconductors using low dielectric constant materials | Lu You, Richard J. Huang | 2001-03-06 |
| 6136729 | Method for improving semiconductor dielectrics | Richard J. Huang, Lu You | 2000-10-24 |
| 6093973 | Hard mask for metal patterning | Minh Van Ngo, Bhanwar Singh, Carmen Morales | 2000-07-25 |
| 6066574 | Hot plate cure process for BCB low k interlevel dielectric | Lu You, Christof Streck | 2000-05-23 |
| 6030901 | Photoresist stripping without degrading low dielectric constant materials | Richard J. Huang, Jacques Bertrand, Lu You | 2000-02-29 |