Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6388330 | Low dielectric constant etch stop layers in integrated circuit interconnects | Minh Van Ngo, Dawn Hopper, Robert A. Huertas | 2002-05-14 |
| 6140255 | Method for depositing silicon nitride using low temperatures | Minh Van Ngo, Khanh B. Nguyen | 2000-10-31 |
| 6114224 | System and method for using N.sub.2 O plasma treatment to eliminate defects at an interface between a stop layer and an integral layered dielectric | Minh Van Ngo | 2000-09-05 |
| 6096661 | Method for depositing silicon dioxide using low temperatures | Minh Van Ngo, Khanh B. Nguyen | 2000-08-01 |
| 6060404 | In-situ deposition of stop layer and dielectric layer during formation of local interconnects | Minh Van Ngo, Darin A. Chan, Sey-Ping Sun, John Caffall | 2000-05-09 |
| 5888898 | HSQ baking for reduced dielectric constant | Minh Van Ngo, Khanh Tran, Lu You, Simon S. Chan, Jean Y. Yang | 1999-03-30 |