| 12159796 |
Systems and methods for integrating load locks into a factory interface footprint space |
Jacob Newman, Andrew J. Constant, Paul B. Reuter, Shay Assaf, Sushant S. Koshti |
2024-12-03 |
| 12142508 |
Factory interface robots usable with integrated load locks |
Sushant S. Koshti, Paul B. Reuter, David Phillips, Jacob Newman, Andrew J. Constant +6 more |
2024-11-12 |
| 12142500 |
Side storage pods, equipment front end modules, and methods for processing substrates |
Devendra Channappa Holeyannavar, Sandesh Doddamane Ramappa, Dean C. Hruzek, Jeffrey A. Brodine |
2024-11-12 |
| 12094752 |
Wafer edge ring lifting solution |
Yogananda Sarode Vishwanath, Sunil Srinivasan, Rajinder Dhindsa, Steven E. Babayan, Olivier Luere +2 more |
2024-09-17 |
| 12091749 |
Method for epitaxially depositing a material on a substrate by flowing a process gas across the substrate from an upper gas inlet to an upper gas outlet and flowing a purge gas from a lower gas inlet to a lower gas outlet |
Tetsuya Ishikawa, Swaminathan Srinivasan, Matthias Bauer, Manjunath Subbanna, Ala Moradian +4 more |
2024-09-17 |
| 12077861 |
Dithering or dynamic offsets for improved uniformity |
Joseph AuBuchon, Sanjeev Baluja, Arkaprava Dan, Hanhong Chen |
2024-09-03 |
| 12074010 |
Atomic layer deposition part coating chamber |
Hanish Kumar Panavalappil Kumarankutty, Steven Marcus, Kirubanandan Naina SHANMUGAM, Sriharsha DHARMAPURA SATHYANARAYANAMURTHY, Madhukar KRISHNA +3 more |
2024-08-27 |
| 12060651 |
Chamber architecture for epitaxial deposition and advanced epitaxial film applications |
Tetsuya Ishikawa, Swaminathan Srinivasan, Kartik Shah, Ala Moradian, Manjunath Subbanna +2 more |
2024-08-13 |
| 12049696 |
Plasma resistant process chamber lid |
Xiaowei Wu, Jennifer Y. Sun |
2024-07-30 |
| 12018372 |
Gas injector for epitaxy and CVD chamber |
Tetsuya Ishikawa, Swaminathan Srinivasan, Matthias Bauer, Ala Moradian, Manjunath Subbanna +4 more |
2024-06-25 |
| 12001193 |
Apparatus for environmental control of dies and substrates for hybrid bonding |
Ying Wang, Xundong Dai, Guan Huei See, Ruiping Wang, Hari Ponnekanti +1 more |
2024-06-04 |
| D1029066 |
Mainframe of dual-robot substrate processing system |
Michael Kuchar, Travis Morey, Adam J. Wyatt, Ofer Amir |
2024-05-28 |
| 11990358 |
Sealed substrate carriers and systems and methods for transporting substrates |
Jeffery Hudgens |
2024-05-21 |
| 11894257 |
Single wafer processing environments with spatial separation |
Joseph AuBuchon, Sanjeev Baluja, Mandyam Sriram |
2024-02-06 |
