Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142469 | Plasma processing chambers configured for tunable substrate and edge sheath control | — | 2024-11-12 |
| 12094752 | Wafer edge ring lifting solution | Michael R. Rice, Yogananda Sarode Vishwanath, Sunil Srinivasan, Steven E. Babayan, Olivier Luere +2 more | 2024-09-17 |
| 12057292 | Feedback loop for controlling a pulsed voltage waveform | Leonid Dorf, Evgeny Kamenetskiy, James Rogers, Olivier Luere, Viacheslav Plotnikov | 2024-08-06 |
| 12009236 | Sensors and system for in-situ edge ring erosion monitor | Yaoling Pan, Patrick Tae, Michael D. Willwerth, Leonard Tedeschi, Daniel Sang Byun +5 more | 2024-06-11 |
| 11984306 | Plasma chamber and chamber component cleaning methods | Linying Cui, James Rogers | 2024-05-14 |