Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12057292 | Feedback loop for controlling a pulsed voltage waveform | Evgeny Kamenetskiy, James Rogers, Olivier Luere, Rajinder Dhindsa, Viacheslav Plotnikov | 2024-08-06 |
| 11948780 | Automatic electrostatic chuck bias compensation during plasma processing | Linying Cui, James Rogers | 2024-04-02 |
| 11935724 | Symmetric VHF source for a plasma reactor | Kartik Ramaswamy, Igor Markovsky, Zhigang Chen, James D. Carducci, Kenneth S. Collins +3 more | 2024-03-19 |