Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183557 | Apparatus and methods for controlling ion energy distribution | James Rogers | 2024-12-31 |
| 12148595 | Plasma uniformity control in pulsed DC plasma chamber | James Rogers | 2024-11-19 |
| 11984306 | Plasma chamber and chamber component cleaning methods | Rajinder Dhindsa, James Rogers | 2024-05-14 |
| 11948780 | Automatic electrostatic chuck bias compensation during plasma processing | James Rogers, Leonid Dorf | 2024-04-02 |
| 11908661 | Apparatus and methods for manipulating power at an edge ring in plasma process device | James Rogers | 2024-02-20 |
| 11901157 | Apparatus and methods for controlling ion energy distribution | James Rogers | 2024-02-13 |