Issued Patents 2020
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10872800 | Electrostatic chuck assembly for high temperature processes | — | 2020-12-22 |
| D904640 | Substrate carrier | Fred Eric Ruhland, Sumit Subhash Patankar, Daniel Lee Diehl, Mingwei Zhu, Hiroyuki Takahama +1 more | 2020-12-08 |
| 10790180 | Electrostatic chuck with variable pixelated magnetic field | Chih-Hsun Hsu, Tza-Jing Gung, Benjamin Schwarz, Shahid Rauf, Ankur Agarwal +2 more | 2020-09-29 |
| 10770270 | High power electrostatic chuck with aperture-reducing plug in a gas hole | Jaeyong Cho, Haitao Wang, Kartik Ramaswamy, Chunlei Zhang | 2020-09-08 |
| 10736182 | Apparatus, systems, and methods for temperature control of substrates using embedded fiber optics and epoxy optical diffusers | Matthew J. Busche, Wendell Glenn Boyd, Jr., Todd Egan, Gregory L. Kirk, Michael R. Rice +1 more | 2020-08-04 |
| 10688750 | Bonding structure of E chuck to aluminum base configuration | Roger Alan Lindley | 2020-06-23 |
| 10685861 | Direct optical heating of substrates through optical guide | — | 2020-06-16 |
| 10679885 | Substrate support assembly with deposited surface features | Wendell Glenn Boyd, Jr., Teng-Fang Kuo, Zhenwen Ding | 2020-06-09 |
| 10622229 | Electrostatic chuck with independent zone cooling and reduced crosstalk | Konstantin Makhratchev | 2020-04-14 |
| 10582570 | Sensor system for multi-zone electrostatic chuck | — | 2020-03-03 |
| 10557202 | Method of processing a substrate support assembly | Wendell Glen Boyd, Jr., Senh Thach | 2020-02-11 |
| 10541171 | Protective cover for electrostatic chuck | — | 2020-01-21 |
| 10535544 | Tunable temperature controlled substrate support assembly | Steven E. Babayan, Konstantin Makhratchev, Zhiqiang Guo, Phillip R. Sommer, Dan Marohl | 2020-01-14 |