Issued Patents 2020
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10837122 | Method and apparatus for precleaning a substrate surface prior to epitaxial growth | Christopher S. Olsen, Theresa Kramer Guarini, Jeffrey Tobin, Peter Stone, Chi-Wei Lo +1 more | 2020-11-17 |
| 10770272 | Plasma-enhanced anneal chamber for wafer outgassing | Matthew D. Scotney-Castle, Norman L. Tam, Matthew Spuller, Kong CHAN, Dongming Iu | 2020-09-08 |
| 10763090 | High pressure RF-DC sputtering and methods to improve film uniformity and step-coverage of this process | Adolph Miller Allen, Zhigang Xie, Muhammad M. Rasheed, Rongjun Wang, Xianmin Tang +8 more | 2020-09-01 |
| 10763141 | Non-contact temperature calibration tool for a substrate support and method of using the same | Niraj Merchant, Mehran Behdjat, Dietrich Gage, Christopher Dao, Binh Minh Nguyen +2 more | 2020-09-01 |
| 10741428 | Semiconductor processing chamber | Aaron Muir Hunter, Mehran Behdjat, Niraj Merchant, Douglas R. McAllister, Dongming Iu +1 more | 2020-08-11 |
| 10689757 | Gas injection apparatus with heating channels | Agus Sofian Tjandra, Emre Cuvalci | 2020-06-23 |
| 10636650 | Argon addition to remote plasma oxidation | Hansel LO, Christopher S. Olsen, Eric Kihara Shono, Johanes S. Swenberg, Erika HANSEN +1 more | 2020-04-28 |
| 10626500 | Showerhead design | Kartik Shah, Chaitanya A. PRASAD, Kevin Joseph Bautista, Jeffrey Tobin, Umesh M. Kelkar | 2020-04-21 |
| 10571337 | Thermal cooling member with low temperature control | Samuel C. Howells, Wolfgang Aderhold, Leonid M. Tertitski, Michael S. Liu, Dongming Iu +2 more | 2020-02-25 |
| 10535513 | Apparatus and methods for backside passivation | Jeffrey Tobin | 2020-01-14 |