Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763141 | Non-contact temperature calibration tool for a substrate support and method of using the same | Lara Hawrylchak, Mehran Behdjat, Dietrich Gage, Christopher Dao, Binh Minh Nguyen +2 more | 2020-09-01 |
| 10741428 | Semiconductor processing chamber | Aaron Muir Hunter, Mehran Behdjat, Douglas R. McAllister, Dongming Iu, Kong CHAN +1 more | 2020-08-11 |