Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10857623 | Annealing apparatus using two wavelengths of radiation | Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur +2 more | 2020-12-08 |
| 10840100 | Method of thermal processing structures formed on a substrate | Paul G. Carey, Dean Jennings, Abhilash J. Mayur, Stephen Moffatt, William Schaffer +2 more | 2020-11-17 |
| 10741428 | Semiconductor processing chamber | Mehran Behdjat, Niraj Merchant, Douglas R. McAllister, Dongming Iu, Kong CHAN +1 more | 2020-08-11 |
| 10741457 | System for non radial temperature control for rotating substrates | Wolfgang Aderhold, Joseph M. Ranish | 2020-08-11 |
| 10727093 | Light pipe window structure for low pressure thermal processes | Paul Brillhart, Joseph M. Ranish, Edric Tong, James Francis Mack, Kin Pong Lo +3 more | 2020-07-28 |
| 10699922 | Light pipe arrays for thermal chamber applications and thermal processes | Joseph M. Ranish | 2020-06-30 |
| 10537965 | Fiber array line generator | Douglas E. Holmgren, Samuel C. Howells, Theodore P. Moffitt, Diwakar Kedlaya | 2020-01-21 |