| 10872790 |
Optical system |
— |
2020-12-22 |
| 10857623 |
Annealing apparatus using two wavelengths of radiation |
Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur +2 more |
2020-12-08 |
| 10820379 |
Lamp base adapter design for baseless lamps |
Aaron Miller, Oleg V. Serebryanov |
2020-10-27 |
| 10741457 |
System for non radial temperature control for rotating substrates |
Wolfgang Aderhold, Aaron Muir Hunter |
2020-08-11 |
| 10734257 |
Direct current lamp driver for substrate processing |
Oleg V. Serebryanov, Alexander Goldin |
2020-08-04 |
| 10727093 |
Light pipe window structure for low pressure thermal processes |
Paul Brillhart, Aaron Muir Hunter, Edric Tong, James Francis Mack, Kin Pong Lo +3 more |
2020-07-28 |
| 10699922 |
Light pipe arrays for thermal chamber applications and thermal processes |
Aaron Muir Hunter |
2020-06-30 |
| 10672641 |
Sol gel coated support ring |
— |
2020-06-02 |
| 10665484 |
Support ring with encapsulated light barrier |
— |
2020-05-26 |
| 10661223 |
Anneal chamber with getter |
— |
2020-05-26 |
| 10610884 |
Substrate processing system having susceptorless substrate support with enhanced substrate heating control |
Kailash Kiran Patalay |
2020-04-07 |
