Issued Patents 2020
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10872790 | Optical system | — | 2020-12-22 |
| 10857623 | Annealing apparatus using two wavelengths of radiation | Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur +2 more | 2020-12-08 |
| 10820379 | Lamp base adapter design for baseless lamps | Aaron Miller, Oleg V. Serebryanov | 2020-10-27 |
| 10741457 | System for non radial temperature control for rotating substrates | Wolfgang Aderhold, Aaron Muir Hunter | 2020-08-11 |
| 10734257 | Direct current lamp driver for substrate processing | Oleg V. Serebryanov, Alexander Goldin | 2020-08-04 |
| 10727093 | Light pipe window structure for low pressure thermal processes | Paul Brillhart, Aaron Muir Hunter, Edric Tong, James Francis Mack, Kin Pong Lo +3 more | 2020-07-28 |
| 10699922 | Light pipe arrays for thermal chamber applications and thermal processes | Aaron Muir Hunter | 2020-06-30 |
| 10672641 | Sol gel coated support ring | — | 2020-06-02 |
| 10665484 | Support ring with encapsulated light barrier | — | 2020-05-26 |
| 10661223 | Anneal chamber with getter | — | 2020-05-26 |
| 10610884 | Substrate processing system having susceptorless substrate support with enhanced substrate heating control | Kailash Kiran Patalay | 2020-04-07 |