Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10610884 | Substrate processing system having susceptorless substrate support with enhanced substrate heating control | Joseph M. Ranish | 2020-04-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10610884 | Substrate processing system having susceptorless substrate support with enhanced substrate heating control | Joseph M. Ranish | 2020-04-07 |