Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763141 | Non-contact temperature calibration tool for a substrate support and method of using the same | Niraj Merchant, Lara Hawrylchak, Mehran Behdjat, Dietrich Gage, Binh Minh Nguyen +2 more | 2020-09-01 |