Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770272 | Plasma-enhanced anneal chamber for wafer outgassing | Lara Hawrylchak, Matthew D. Scotney-Castle, Norman L. Tam, Kong CHAN, Dongming Iu | 2020-09-08 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770272 | Plasma-enhanced anneal chamber for wafer outgassing | Lara Hawrylchak, Matthew D. Scotney-Castle, Norman L. Tam, Kong CHAN, Dongming Iu | 2020-09-08 |