Issued Patents 2019
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10520823 | EUV lithography system and method with optimized throughput and stability | Yen-Cheng Lu, Jeng-Horng Chen, Shun-Der Wu | 2019-12-31 |
| 10520806 | Pellicle for EUV mask and fabrication thereof | Chih-Tsung Shih, Shinn-Sheng Yu, Jeng-Horng Chen | 2019-12-31 |
| 10514597 | Lithography mask with both transmission-type and reflective-type overlay marks and method of fabricating the same | Yun-Yue Lin, Hsin-Chang Lee, Chia-Jen Chen, Chih-Cheng Lin, Chin-Hsiang Lin | 2019-12-24 |
| 10459352 | Mask cleaning | Shu-Hao Chang, Norman Chen, Jeng-Horng Chen, Kuo-Chang Kau, Ming-Chin Chien +2 more | 2019-10-29 |
| 10459353 | Lithography system with an embedded cleaning module | Shang-Chieh Chien, Jeng-Horng Chen, Jui-Ching Wu, Chia-Chen Chen, Hung-Chang Hsieh +3 more | 2019-10-29 |
| 10429314 | EUV vessel inspection method and related system | Chun-Lin Chang, Shang-Chieh Chien, Shang-Ying WU, Li-Kai Cheng, Tzung-Chi Fu +4 more | 2019-10-01 |
| 10353285 | Pellicle structures and methods of fabricating thereof | Hsin-Chang Lee, Pei-Cheng Hsu, Yun-Yue Lin, Hsuan-Chen Chen, Hsuan-I WANG | 2019-07-16 |
| 10276372 | Method for integrated circuit patterning | Chih-Tsung Shih, Shinn-Sheng Yu, Jeng-Horng Chen | 2019-04-30 |
| 10274838 | System and method for performing lithography process in semiconductor device fabrication | Jui-Ching Wu, Jeng-Horng Chen, Chia-Chen Chen, Shu-Hao Chang, Shang-Chieh Chien +1 more | 2019-04-30 |
| 10274819 | EUV pellicle fabrication methods and structures thereof | Pei-Cheng Hsu, Chih-Tsung Shih, Jeng-Horng Chen, Chih-Cheng Lin, Hsin-Chang Lee +2 more | 2019-04-30 |
| 10168611 | Mask with multilayer structure and manufacturing method by using the same | Chih-Tsung Shih, Jeng-Horng Chen, Shinn-Sheng Yu | 2019-01-01 |