Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514610 | Lithography patterning with a gas phase resist | Shu-Hao Chang, Kevin Huang, Jeng-Horng Chen | 2019-12-24 |
| 10459352 | Mask cleaning | Shu-Hao Chang, Norman Chen, Jeng-Horng Chen, Ming-Chin Chien, Shang-Chieh Chien +2 more | 2019-10-29 |