Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514610 | Lithography patterning with a gas phase resist | Kuo-Chang Kau, Kevin Huang, Jeng-Horng Chen | 2019-12-24 |
| 10459352 | Mask cleaning | Norman Chen, Jeng-Horng Chen, Kuo-Chang Kau, Ming-Chin Chien, Shang-Chieh Chien +2 more | 2019-10-29 |
| 10274838 | System and method for performing lithography process in semiconductor device fabrication | Jui-Ching Wu, Jeng-Horng Chen, Chia-Chen Chen, Shang-Chieh Chien, Ming-Chin Chien +1 more | 2019-04-30 |