Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10459352 | Mask cleaning | Shu-Hao Chang, Jeng-Horng Chen, Kuo-Chang Kau, Ming-Chin Chien, Shang-Chieh Chien +2 more | 2019-10-29 |
| 10401837 | Generating risk inventory and common process window for adjustment of manufacturing tool | Hongxin Zhang, Shaowen Gao | 2019-09-03 |
| 10386715 | Methodology for post-integration awareness in optical proximity correction | Feng Wang, Hongxin Zhang, Shaowen Gao | 2019-08-20 |