Issued Patents 2019
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10512147 | Extreme ultraviolet radiation source and droplet catcher thereof | Chi-Ming Yang, Sheng-Ta Lin, Ssu-Yu Chen, Li-Jui Chen, Po-Chung Cheng | 2019-12-17 |
| 10506698 | EUV source generation method and related system | Chun-Lin Chang, Tzung-Chi Fu, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng +1 more | 2019-12-10 |
| 10495987 | Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system | Chi-Ming Yang, Ssu-Yu Chen, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2019-12-03 |
| 10477663 | Light source for lithography exposure process | Chieh Hsieh, Chun-Chia Hsu, Bo-Tsun Liu, Tzung-Chi Fu, Li-Jui Chen +1 more | 2019-11-12 |
| 10459353 | Lithography system with an embedded cleaning module | Jeng-Horng Chen, Jui-Ching Wu, Chia-Chen Chen, Hung-Chang Hsieh, Chi-Lun Lu +3 more | 2019-10-29 |
| 10459352 | Mask cleaning | Shu-Hao Chang, Norman Chen, Jeng-Horng Chen, Kuo-Chang Kau, Ming-Chin Chien +2 more | 2019-10-29 |
| 10429314 | EUV vessel inspection method and related system | Chun-Lin Chang, Shang-Ying WU, Li-Kai Cheng, Tzung-Chi Fu, Bo-Tsun Liu +4 more | 2019-10-01 |
| 10314154 | System and method for extreme ultraviolet source control | Chun-Chia Hsu, Chieh Hsieh, Li-Jui Chen, Po-Chung Cheng, Tzung-Chi Fu +1 more | 2019-06-04 |
| 10274838 | System and method for performing lithography process in semiconductor device fabrication | Jui-Ching Wu, Jeng-Horng Chen, Chia-Chen Chen, Shu-Hao Chang, Ming-Chin Chien +1 more | 2019-04-30 |
| 10274844 | Lithography apparatus and method for protecting a reticle | Jen-Yang Chung, Chieh Hsieh, Li-Jui Chen, Po-Chung Cheng | 2019-04-30 |