Issued Patents 2019
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10524345 | Residual gain monitoring and reduction for EUV drive laser | Jen-Hao Yeh, Han-Lung Chang, Tzung-Chi Fu, Bo-Tsun Liu, Li-Jui Chen +1 more | 2019-12-31 |
| 10509311 | Apparatus and method for generating an electromagnetic radiation | Chung-Chieh Lee, Feng Yuan Hsu, Chyi Shyuan Chern, Chi-Ming Yang, Tsiao-Chen Wu | 2019-12-17 |
| 10506698 | EUV source generation method and related system | Tzung-Chi Fu, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng, Wei YI +1 more | 2019-12-10 |
| 10429729 | EUV radiation modification methods and systems | Jen-Hao Yeh, Tzung-Chi Fu, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2019-10-01 |
| 10429314 | EUV vessel inspection method and related system | Shang-Chieh Chien, Shang-Ying WU, Li-Kai Cheng, Tzung-Chi Fu, Bo-Tsun Liu +4 more | 2019-10-01 |
| 10310380 | High-brightness light source | Tsiao-Chen Wu | 2019-06-04 |
| 10167567 | High resistance virtual anode for electroplating cell | Po-Wei Wang | 2019-01-01 |