Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10524345 | Residual gain monitoring and reduction for EUV drive laser | Chun-Lin Chang, Jen-Hao Yeh, Tzung-Chi Fu, Bo-Tsun Liu, Li-Jui Chen +1 more | 2019-12-31 |
| 10509324 | Light source for lithography exposure process | Hsin-Feng Chen, Li-Jui Chen, Bo-Tsun Liu | 2019-12-17 |
| 10361134 | Method for lithographic process and lithographic system | Wei-Chih Lai, Li-Kai Cheng, Shun-Jung Chen, Bo-Tsun Liu, Tzung-Chi Fu +1 more | 2019-07-23 |
| 10338475 | Light source for lithography exposure process | Hsin-Feng Chen, Li-Jui Chen, Bo-Tsun Liu | 2019-07-02 |
| 10342109 | Apparatus and method for generating extreme ultraviolet radiation | Wei-Chih Lai, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2019-07-02 |
| 10331035 | Light source for lithography exposure process | Cheng-Hao LAI, Li-Jui Chen | 2019-06-25 |