Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522652 | Method for fabricating semiconductor device with reduced wafer edge defects | Po-Wen Su, Chih-Wei Lin, Tai-Yen Lin | 2019-12-31 |
| 10410797 | Method of fabricating solar cell | Chao-Yu Chen, Tzung-Fang Guo | 2019-09-10 |
| 10361134 | Method for lithographic process and lithographic system | Li-Kai Cheng, Shun-Jung Chen, Bo-Tsun Liu, Han-Lung Chang, Tzung-Chi Fu +1 more | 2019-07-23 |
| 10342109 | Apparatus and method for generating extreme ultraviolet radiation | Han-Lung Chang, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2019-07-02 |