Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10429314 | EUV vessel inspection method and related system | Chun-Lin Chang, Shang-Chieh Chien, Shang-Ying WU, Tzung-Chi Fu, Bo-Tsun Liu +4 more | 2019-10-01 |
| 10361134 | Method for lithographic process and lithographic system | Wei-Chih Lai, Shun-Jung Chen, Bo-Tsun Liu, Han-Lung Chang, Tzung-Chi Fu +1 more | 2019-07-23 |