Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10361134 | Method for lithographic process and lithographic system | Wei-Chih Lai, Li-Kai Cheng, Bo-Tsun Liu, Han-Lung Chang, Tzung-Chi Fu +1 more | 2019-07-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10361134 | Method for lithographic process and lithographic system | Wei-Chih Lai, Li-Kai Cheng, Bo-Tsun Liu, Han-Lung Chang, Tzung-Chi Fu +1 more | 2019-07-23 |