Issued Patents 2019
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10512946 | Gigasonic cleaning techniques | Ying-Hsueh Chang Chien | 2019-12-24 |
| 10513006 | High throughput CMP platform | Jiann Lih Wu, Jason Shen, Soon-Kang Huang, James Jeng-Jyi Hwang | 2019-12-24 |
| 10509311 | Apparatus and method for generating an electromagnetic radiation | Chung-Chieh Lee, Feng Yuan Hsu, Chyi Shyuan Chern, Tsiao-Chen Wu, Chun-Lin Chang | 2019-12-17 |
| 10507498 | Apparatus for particle cleaning | Ying-Hsueh Chang Chien, James Jeng-Jyi Hwang | 2019-12-17 |
| 10510655 | Semiconductor devices employing a barrier layer | Ying-Hsueh Chang Chien, Yu-Ming Lee, Man-Kit Leung | 2019-12-17 |
| 10512147 | Extreme ultraviolet radiation source and droplet catcher thereof | Sheng-Ta Lin, Ssu-Yu Chen, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2019-12-17 |
| 10495987 | Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system | Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2019-12-03 |
| 10460999 | Metrology device and metrology method thereof | Su-Horng Lin | 2019-10-29 |
| 10269591 | Method of selectively removing silicon nitride and single wafer etching apparatus thereof | Ying-Hsueh Changchien, Yu-Ming Lee | 2019-04-23 |
| 10181415 | 3D IC bump height metrology APC | Nai-Han Cheng | 2019-01-15 |