Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10513006 | High throughput CMP platform | Jiann Lih Wu, Jason Shen, Soon-Kang Huang, Chi-Ming Yang | 2019-12-24 |
| 10507498 | Apparatus for particle cleaning | Ying-Hsueh Chang Chien, Chi-Ming Yang | 2019-12-17 |