Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510566 | Cluster tool techniques with improved efficiency | Tsung-Hsun Yu, Victor Lu | 2019-12-17 |
| 10460999 | Metrology device and metrology method thereof | Chi-Ming Yang | 2019-10-29 |