Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10477663 | Light source for lithography exposure process | Chieh Hsieh, Shang-Chieh Chien, Bo-Tsun Liu, Tzung-Chi Fu, Li-Jui Chen +1 more | 2019-11-12 |
| 10314154 | System and method for extreme ultraviolet source control | Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng, Tzung-Chi Fu +1 more | 2019-06-04 |