Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522413 | Method of forming source/drain contact | Ming-Jhih Kuo, Yu-Hsien Lin, Jhun Hua Chen | 2019-12-31 |
| 10459353 | Lithography system with an embedded cleaning module | Shang-Chieh Chien, Jeng-Horng Chen, Jui-Ching Wu, Chia-Chen Chen, Chi-Lun Lu +3 more | 2019-10-29 |