Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522413 | Method of forming source/drain contact | Yu-Hsien Lin, Hung-Chang Hsieh, Jhun Hua Chen | 2019-12-31 |
| 10451979 | Apparatus for EUV lithography and method of measuring focus | Yi Liu, Yuan-Yen Lo | 2019-10-22 |
| 10276377 | Method for patterning interconnects | Yung-Sung Yen, Yu-Hsun Chen, Chen-Hau Wu, Chun-Kuang Chen, Ta-Ching Yu +2 more | 2019-04-30 |