Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514597 | Lithography mask with both transmission-type and reflective-type overlay marks and method of fabricating the same | Hsin-Chang Lee, Chia-Jen Chen, Chih-Cheng Lin, Anthony Yen, Chin-Hsiang Lin | 2019-12-24 |
| 10394114 | Chromeless phase shift mask structure and process | Hsin-Chang Lee | 2019-08-27 |
| 10353285 | Pellicle structures and methods of fabricating thereof | Hsin-Chang Lee, Pei-Cheng Hsu, Hsuan-Chen Chen, Hsuan-I WANG, Anthony Yen | 2019-07-16 |