Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514597 | Lithography mask with both transmission-type and reflective-type overlay marks and method of fabricating the same | Yun-Yue Lin, Hsin-Chang Lee, Chia-Jen Chen, Anthony Yen, Chin-Hsiang Lin | 2019-12-24 |
| 10399310 | Resin film, laminate, optical member, gas barrier material and touch sensor substrate | Mitsunori Nodono, Takashi Sakurai, Katsunori Mochizuki, Junichi IKEUCHI, Boram PYEON +2 more | 2019-09-03 |
| 10295899 | Photomask including fiducial mark, method of patterning the photomask and method of making semiconductor device using the photomask | Hsin-Chang Lee, Chia-Jen Chen, Ping-Hsun Lin | 2019-05-21 |
| 10274819 | EUV pellicle fabrication methods and structures thereof | Pei-Cheng Hsu, Chih-Tsung Shih, Jeng-Horng Chen, Hsin-Chang Lee, Shinn-Sheng Yu +2 more | 2019-04-30 |