Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10520806 | Pellicle for EUV mask and fabrication thereof | Chih-Tsung Shih, Jeng-Horng Chen, Anthony Yen | 2019-12-31 |
| 10274819 | EUV pellicle fabrication methods and structures thereof | Pei-Cheng Hsu, Chih-Tsung Shih, Jeng-Horng Chen, Chih-Cheng Lin, Hsin-Chang Lee +2 more | 2019-04-30 |
| 10276372 | Method for integrated circuit patterning | Chih-Tsung Shih, Jeng-Horng Chen, Anthony Yen | 2019-04-30 |
| 10168611 | Mask with multilayer structure and manufacturing method by using the same | Chih-Tsung Shih, Jeng-Horng Chen, Anthony Yen | 2019-01-01 |