Issued Patents 2019
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522464 | Interconnection structure and methods of fabrication the same | Shih-Ming Chang | 2019-12-31 |
| 10520806 | Pellicle for EUV mask and fabrication thereof | Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2019-12-31 |
| 10509334 | Methods and apparatus for removing contamination from lithographic tool | Zi-Wen Chen, Po-Chung Cheng, Li-Jui Chen, Shih-Chang Shih | 2019-12-17 |
| 10366973 | Layout modification method for exposure manufacturing process | Hung-Wen Cho, Fu-Jye Liang, Chun-Kuang Chen, Li-Jui Chen, Po-Chung Cheng +1 more | 2019-07-30 |
| 10276372 | Method for integrated circuit patterning | Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2019-04-30 |
| 10274819 | EUV pellicle fabrication methods and structures thereof | Pei-Cheng Hsu, Jeng-Horng Chen, Chih-Cheng Lin, Hsin-Chang Lee, Shinn-Sheng Yu +2 more | 2019-04-30 |
| 10168611 | Mask with multilayer structure and manufacturing method by using the same | Jeng-Horng Chen, Shinn-Sheng Yu, Anthony Yen | 2019-01-01 |