Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10509334 | Methods and apparatus for removing contamination from lithographic tool | Zi-Wen Chen, Po-Chung Cheng, Chih-Tsung Shih, Li-Jui Chen | 2019-12-17 |
SS
Shih-Chang Shih
Overall (2019): #271,017 of 560,194Top 50%
1
Patents 2019