Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10353285 | Pellicle structures and methods of fabricating thereof | Hsin-Chang Lee, Yun-Yue Lin, Hsuan-Chen Chen, Hsuan-I WANG, Anthony Yen | 2019-07-16 |
| 10274819 | EUV pellicle fabrication methods and structures thereof | Chih-Tsung Shih, Jeng-Horng Chen, Chih-Cheng Lin, Hsin-Chang Lee, Shinn-Sheng Yu +2 more | 2019-04-30 |