Issued Patents 2018
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115568 | Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring | Michael C. Kellogg, Alexei Marakhtanov, Zhigang Chen, Felix Kozakevich, Kenneth Lucchesi | 2018-10-30 |
| 10115564 | Uniformity control circuit for use within an impedance matching circuit | Alexei Marakhtanov, Felix Kozakevich, Kenneth Lucchesi | 2018-10-30 |
| 10083853 | Electrostatic chuck design for cooling-gas light-up prevention | Alexander Matyushkin, Alexei Marakhtanov, Keith Gaff, Felix Kozakevich | 2018-09-25 |
| 10049862 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, Michael C. Kellogg, James E. Tappan, Jerrel K. Antolik, Ian Kenworthy +2 more | 2018-08-14 |
| 10026592 | Systems and methods for tailoring ion energy distribution function by odd harmonic mixing | Zhigang Chen, Alexei Marakhtanov | 2018-07-17 |
| 10002746 | Multi regime plasma wafer processing to increase directionality of ions | Alexei Marakhtanov, Lin Zhao, Felix Kozakevich, Kenneth Lucchesi, Zhigang Chen | 2018-06-19 |
| 9984859 | Impedance matching circuit for operation with a kilohertz RF generator and a megahertz RF generator to control plasma processes | Alexei Marakhtanov, Felix Kozakevich, Brett Jacobs | 2018-05-29 |
| 9978565 | Systems for cooling RF heated chamber components | Jon McChesney, Saravanapriyan Sriraman, Ricky Marsh, Alex Paterson | 2018-05-22 |
| 9947557 | Semiconductor processing system having multiple decoupled plasma sources | Peter L. G. Ventzek, Harmeet Singh, Richard A. Gottscho | 2018-04-17 |
| 9883549 | Substrate support assembly having rapid temperature control | Alexander Matyushkin, Dan Katz, Theodoros Panagopoulos, Michael D. Willwerth | 2018-01-30 |