Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162272 | Metrology method and apparatus, substrates for use in such methods, lithographic system and device manufacturing method | Martin Jacobus Johan Jak, Te-Chih Huang, Victor Emanuel Calado, Henricus Wilhelmus Maria Van Buel, Richard Johannes Franciscus Van Haren | 2018-12-25 |
| 10162271 | Metrology method and apparatus, substrate, lithographic system and device manufacturing method | Bastiaan Onne Fagginger Auer, Davit Harutyunyan, Patrick Warnaar | 2018-12-25 |
| 10126662 | Metrology method and apparatus, lithographic system and device manufacturing method | Scott Anderson Middlebrooks, Niels Geypen, Alexander Straaijer, Maurits Van Der Schaar, Markus Gerardus Martinus Maria Van Kraaij | 2018-11-13 |
| 10042268 | Method, apparatus and substrates for lithographic metrology | Arie Jeffrey Den Boef, Omer Abubaker Omer Adam, Martin Jacobus Johan Jak | 2018-08-07 |
| 9946167 | Metrology method and inspection apparatus, lithographic system and device manufacturing method | Arno Jan Bleeker, Willem Marie Julia Marcel Coene, Patrick Warnaar, Michael Kubis | 2018-04-17 |
| 9910366 | Metrology method and apparatus, lithographic system and device manufacturing method | Scott Anderson Middlebrooks, Niels Geypen, Alexander Straaijer, Maurits Van Der Schaar, Markus Gerardus Martinus Maria Van Kraaij | 2018-03-06 |
| 9879988 | Metrology method and apparatus, computer program and lithographic system | Xing Lan Liu, Yue-Lin Peng, Hakki Ergün Cekli, Josselin Pello, Richard Johannes Franciscus Van Haren | 2018-01-30 |