Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9879988 | Metrology method and apparatus, computer program and lithographic system | Xing Lan Liu, Hendrik Jan Hidde Smilde, Yue-Lin Peng, Hakki Ergün Cekli, Richard Johannes Franciscus Van Haren | 2018-01-30 |