Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10025193 | Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | Hakki Ergün Cekli, Daan Maurits Slotboom, Wim Tjibbo Tel, Stefan Cornelis Theodorus Van Der Sanden, Richard Johannes Franciscus Van Haren | 2018-07-17 |
| 9879988 | Metrology method and apparatus, computer program and lithographic system | Hendrik Jan Hidde Smilde, Yue-Lin Peng, Hakki Ergün Cekli, Josselin Pello, Richard Johannes Franciscus Van Haren | 2018-01-30 |