Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10095131 | Alignment modeling and a lithographic apparatus and exposure method using the same | Pieter Jacob Kramer, Rogier Sebastiaan GILIJAMSE, Niels Lammers | 2018-10-09 |
| 10025193 | Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | Hakki Ergün Cekli, Xing Lan Liu, Wim Tjibbo Tel, Stefan Cornelis Theodorus Van Der Sanden, Richard Johannes Franciscus Van Haren | 2018-07-17 |
| 9989858 | Apparatus operable to perform a measurement operation on a substrate, lithographic apparatus, and method of performing a measurement operation on a substrate | Pieter Jacob Kramer, Martinus Hendrikus Antonius Leenders, Bart Dinand Paarhuis | 2018-06-05 |
| 9971251 | Lithography system and a machine learning controller for such a lithography system | Emil Peter Schmitt-Weaver, Wolfgang Henke, Thomas Leo Maria Hoogenboom, Pavel Izikson, Paul Frank Luehrmann +2 more | 2018-05-15 |