Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10095131 | Alignment modeling and a lithographic apparatus and exposure method using the same | Rogier Sebastiaan GILIJAMSE, Niels Lammers, Daan Maurits Slotboom | 2018-10-09 |
| 9989858 | Apparatus operable to perform a measurement operation on a substrate, lithographic apparatus, and method of performing a measurement operation on a substrate | Daan Maurits Slotboom, Martinus Hendrikus Antonius Leenders, Bart Dinand Paarhuis | 2018-06-05 |