Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9989858 | Apparatus operable to perform a measurement operation on a substrate, lithographic apparatus, and method of performing a measurement operation on a substrate | Daan Maurits Slotboom, Pieter Jacob Kramer, Martinus Hendrikus Antonius Leenders | 2018-06-05 |