Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162272 | Metrology method and apparatus, substrates for use in such methods, lithographic system and device manufacturing method | Martin Jacobus Johan Jak, Hendrik Jan Hidde Smilde, Te-Chih Huang, Victor Emanuel Calado, Henricus Wilhelmus Maria Van Buel | 2018-12-25 |
| 10061212 | Metrology target, method and apparatus, target design method, computer program and lithographic system | Maurits Van Der Schaar, Everhardus Cornelis Mos, Youping Zhang | 2018-08-28 |
| 10025193 | Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | Hakki Ergün Cekli, Xing Lan Liu, Daan Maurits Slotboom, Wim Tjibbo Tel, Stefan Cornelis Theodorus Van Der Sanden | 2018-07-17 |
| 9946165 | Methods and apparatus for obtaining diagnostic information relating to an industrial process | Alexander Ypma, Jasper Menger, David Deckers, David Han, Adrianus Cornelis Matheus Koopman +3 more | 2018-04-17 |
| 9879988 | Metrology method and apparatus, computer program and lithographic system | Xing Lan Liu, Hendrik Jan Hidde Smilde, Yue-Lin Peng, Hakki Ergün Cekli, Josselin Pello | 2018-01-30 |