Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162272 | Metrology method and apparatus, substrates for use in such methods, lithographic system and device manufacturing method | Martin Jacobus Johan Jak, Hendrik Jan Hidde Smilde, Te-Chih Huang, Victor Emanuel Calado, Richard Johannes Franciscus Van Haren | 2018-12-25 |
| 10101677 | Inspection apparatus for measuring properties of a target structure, methods of operating an optical system, method of manufacturing devices | Kim Gerard Feijen, Martinus Joseph Kok | 2018-10-16 |